Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Krockel,Veli-Matti Airaksinen,Sami Franssila,Veikko Lindroos,Ari Lehto,Teruaki Motooka
Publsiher: Elsevier
Total Pages: 668
Release: 2009-12-08
ISBN: 9780815519881
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Handbook of Silicon Based MEMS Materials and Technologies Book Excerpt:

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Veikko Lindroos
Publsiher: William Andrew
Total Pages: 826
Release: 2015-09-02
ISBN: 0323312233
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Handbook of Silicon Based MEMS Materials and Technologies Book Excerpt:

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
Publsiher: Elsevier
Total Pages: 1026
Release: 2020-04-17
ISBN: 012817787X
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Handbook of Silicon Based MEMS Materials and Technologies Book Excerpt:

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Developments in Surface Contamination and Cleaning Methods for Surface Cleaning

Developments in Surface Contamination and Cleaning  Methods for Surface Cleaning
Author: Rajiv Kohli,Kashmiri L. Mittal
Publsiher: William Andrew
Total Pages: 212
Release: 2016-11-04
ISBN: 0323431720
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Developments in Surface Contamination and Cleaning Methods for Surface Cleaning Book Excerpt:

Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Provides a comprehensive coverage of innovations in surface cleaning Written by established experts in the surface cleaning field, presenting an authoritative resource Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Non wettable Surfaces

Non wettable Surfaces
Author: Robin Ras,Abraham Marmur
Publsiher: Royal Society of Chemistry
Total Pages: 405
Release: 2016-11-25
ISBN: 1782621547
Category: Science
Language: EN, FR, DE, ES & NL

Non wettable Surfaces Book Excerpt:

Nothing provided

Chemical and Biological Sensors 11 and MEMS NEMS 11

Chemical and Biological Sensors 11  and  MEMS NEMS 11
Author: Z. Aguilar,P. Hesketh,M. Carter,J. Li,C. Kreller,G. Hunter,P. Sekhar,L. Nagahara,A. Simonian,P. Vanýsek,N. Wu,B. Chin,S. Mitra,R. Stefan-van Staden,A. Khosla
Publsiher: The Electrochemical Society
Total Pages: 252
Release: 2014
ISBN: 160768537X
Category: Electronic Book
Language: EN, FR, DE, ES & NL

Chemical and Biological Sensors 11 and MEMS NEMS 11 Book Excerpt:

Silicon Sensors and Actuators

Silicon Sensors and Actuators
Author: Benedetto Vigna,Paolo Ferrarini,Flavio Francesco Villa,Ernesto Lasalandra,Sarah Zerbini
Publsiher: Springer Nature
Total Pages: 997
Release: 2022-04-12
ISBN: 3030801357
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Silicon Sensors and Actuators Book Excerpt:

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

Porous Silicon From Formation to Application Biomedical and Sensor Applications Volume Two

Porous Silicon  From Formation to Application  Biomedical and Sensor Applications  Volume Two
Author: Ghenadii Korotcenkov
Publsiher: CRC Press
Total Pages: 410
Release: 2016-01-05
ISBN: 1482264579
Category: Science
Language: EN, FR, DE, ES & NL

Porous Silicon From Formation to Application Biomedical and Sensor Applications Volume Two Book Excerpt:

Porous silicon is rapidly attracting increasing interest from various fields, including optoelectronics, microelectronics, photonics, medicine, chemistry, and biosensing. This nanostructured and biodegradable material has a range of unique properties that make it ideal for many applications. For example, the pores and surface chemistry of the material can be manipulated to change the rate of drug release from hours to months. Porous Silicon: Biomedical and Sensor Applications, Volume Two is part of the three-book series Porous Silicon: From Formation to Application. It discusses applications of porous silicon in bioengineering and in various sensors, including gas sensors, biosensors, pressure sensors, mechanical sensors, optical sensors, and many other types. It also thoroughly reviews the fabrication, parameters, and applications of devices that use porous silicon. Drawing upon a vast amount of recently published literature, the book guides readers through practical implementations that span environmental control, chemistry, spectroscopy, gas chromatography, microelectronics, micromachining, microfluidics, medicine, biotechnology, and the car industry. It is divided into three sections that focus on: Types of sensors that use porous silicon Auxiliary devices that use porous silicon Biomedical applications such as drug delivery, tissue engineering, and in vivo imaging Representing the most recent progress in applications of porous silicon to biomedical and sensory technology, this reference is indispensable for those involved in the research, development, and application of porous silicon in several scientific disciplines. It also serves as a starting point for the interested but unfamiliar reader to gain a thorough understanding of the unusual properties of porous silicon, other porous materials, and possible areas for current and future applications.

MEMS Product Development

MEMS Product Development
Author: Alissa M. Fitzgerald,Carolyn D. White,Charles C. Chung
Publsiher: Springer Nature
Total Pages: 276
Release: 2021-04-17
ISBN: 3030617092
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

MEMS Product Development Book Excerpt:

Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.

Handbook of Solid State Diffusion Volume 2

Handbook of Solid State Diffusion  Volume 2
Author: Aloke Paul,Sergiy Divinski
Publsiher: Elsevier
Total Pages: 476
Release: 2017-04-13
ISBN: 0128045787
Category: Science
Language: EN, FR, DE, ES & NL

Handbook of Solid State Diffusion Volume 2 Book Excerpt:

Handbook of Solid State Diffusion, Volume 2: Diffusion Analysis in Material Applications covers the basic fundamentals, techniques, applications, and latest developments in the area of solid-state diffusion, offering a pedagogical understanding for students, academicians, and development engineers. Both experimental techniques and computational methods find equal importance in the second of this two volume set. Volume 2 covers practical issues on diffusion phenomena in bulk, thin film, and in nanomaterials. Diffusion related problems and analysis of methods in industrial applications, such as electronic industry, high temperature materials, nuclear materials, and superconductor materials are discussed. Presents a handbook with a short mathematical background and detailed examples of concrete applications of the sophisticated methods of analysis Enables readers to learn the basic concepts of experimental approaches and the computational methods involved in solid-state diffusion Covers bulk, thin film, and nanomaterials Introduces the problems and analysis in important materials systems in various applications Collates contributions from academic and industrial problems from leading scientists involved in developing key concepts across the globe

Flexible Sensors for Energy Harvesting Applications

Flexible Sensors for Energy Harvesting Applications
Author: Anindya Nag
Publsiher: Springer Nature
Total Pages: 135
Release: 2022
ISBN: 303099600X
Category: Electronic Book
Language: EN, FR, DE, ES & NL

Flexible Sensors for Energy Harvesting Applications Book Excerpt:

Emerging Photovoltaic Materials

Emerging Photovoltaic Materials
Author: Santosh K. Kurinec
Publsiher: John Wiley & Sons
Total Pages: 828
Release: 2018-11-30
ISBN: 1119407672
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Emerging Photovoltaic Materials Book Excerpt:

This book covers the recent advances in photovoltaics materials and their innovative applications. Many materials science problems are encountered in understanding existing solar cells and the development of more efficient, less costly, and more stable cells. This important and timely book provides a historical overview, but concentrates primarily on the exciting developments in the last decade. It includes organic and perovskite solar cells, photovoltaics in ferroelectric materials, organic-inorganic hybrid perovskite, materials with improved photovoltaic efficiencies as well as the full range of semiconductor materials for solar-to-electricity conversion, from crystalline silicon and amorphous silicon to cadmium telluride, copper indium gallium sulfide selenides, dye sensitized solar cells, organic solar cells, and environmentally-friendly copper zinc tin sulfide selenides.

Polymers in Organic Electronics

Polymers in Organic Electronics
Author: Sulaiman Khalifeh
Publsiher: Elsevier
Total Pages: 616
Release: 2020-04-01
ISBN: 192788568X
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Polymers in Organic Electronics Book Excerpt:

Polymers in Organic Electronics: Polymer Selection for Electronic, Mechatronic, and Optoelectronic Systems provides readers with vital data, guidelines, and techniques for optimally designing organic electronic systems using novel polymers. The book classifies polymer families, types, complexes, composites, nanocomposites, compounds, and small molecules while also providing an introduction to the fundamental principles of polymers and electronics. Features information on concepts and optimized types of electronics and a classification system of electronic polymers, including piezoelectric and pyroelectric, optoelectronic, mechatronic, organic electronic complexes, and more. The book is designed to help readers select the optimized material for structuring their organic electronic system. Chapters discuss the most common properties of electronic polymers, methods of optimization, and polymeric-structured printed circuit boards. The polymeric structures of optoelectronics and photonics are covered and the book concludes with a chapter emphasizing the importance of polymeric structures for packaging of electronic devices. Provides key identifying details on a range of polymers, micro-polymers, nano-polymers, resins, hydrocarbons, and oligomers Covers the most common electrical, electronic, and optical properties of electronic polymers Describes the underlying theories on the mechanics of polymer conductivity Discusses polymeric structured printed circuit boards, including their rapid prototyping and optimizing their polymeric structures Shows optimization methods for both polymeric structures of organic active electronic components and organic passive electronic components

Accuracy Enhancement Technologies for Micromachining Processes

Accuracy Enhancement Technologies for Micromachining Processes
Author: Golam Kibria,B. Bhattacharyya
Publsiher: Springer Nature
Total Pages: 214
Release: 2020-02-20
ISBN: 9811521174
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Accuracy Enhancement Technologies for Micromachining Processes Book Excerpt:

This book bridges the gap between the demand for micro-featured components on the one hand, and successful micromachining of miniature products on the other. In addition to covering micromachining in the broader sense, it specifically addresses novel machining strategies implemented in various advanced micromachining processes to improve machining accuracy, energy consumption, component durability, and miniature-scale applicability. The book’s main goal is to present the capabilities of advanced micromachining processes in terms of miniature product manufacturing by highlighting various innovative machining strategies that can be used to augment the production scale and precision alike.

Comprehensive Materials Processing

Comprehensive Materials Processing
Author: Anonim
Publsiher: Newnes
Total Pages: 5634
Release: 2014-04-07
ISBN: 0080965334
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Comprehensive Materials Processing Book Excerpt:

Comprehensive Materials Processing provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources

Microreactors in Organic Chemistry and Catalysis

Microreactors in Organic Chemistry and Catalysis
Author: Thomas Wirth
Publsiher: John Wiley & Sons
Total Pages: 478
Release: 2013-02-22
ISBN: 3527659749
Category: Science
Language: EN, FR, DE, ES & NL

Microreactors in Organic Chemistry and Catalysis Book Excerpt:

For the second edition of 'Microreactors in Organic Chemistry and Catalysis' all chapters have been revised and updated to reflect the latest developments in this rapidly developing field. This new edition has 60% more content, and it remains a comprehensive publication covering most aspects of the topic. The use of microreactors in homogeneous, heterogeneous as well as biphasic reactions is covered in the main part of the book, together with catalytic, bioorganic and automation approaches. The initial chapters also provide a solid physical chemistry background on fluidics in microdevices. Finally, a chapter on industrial applications and developments covers recent progress in process chemistry. An excellent reference for beginners and experts alike.

Microfluidics and Nanofluidics

Microfluidics and Nanofluidics
Author: Mohsen Sheikholeslami Kandelousi
Publsiher: BoD – Books on Demand
Total Pages: 318
Release: 2018-08-22
ISBN: 1789235405
Category: Science
Language: EN, FR, DE, ES & NL

Microfluidics and Nanofluidics Book Excerpt:

In the present book, various applications of microfluidics and nanofluidics are introduced. Microfluidics and nanofluidics span a broad array of disciplines including mechanical, materials, and electrical engineering, surface science, chemistry, physics and biology. Also, this book deals with transport and interactions of colloidal particles and biomolecules in microchannels, which have great importance to many microfluidic applications, such as drug delivery in life science, microchannel heat exchangers in electronic cooling, and food processing industry. Furthermore, this book focuses on a detailed description of the thermal transport behavior, challenges and implications that involve the development and use of HTFs under the influence of atomistic-scale structures and industrial applications.

Advanced Functional Materials and Devices

Advanced Functional Materials and Devices
Author: Saluru Baba Krupanidhi,Vinay Gupta,Anjali Sharma Kaushik,Anjani Kumar Singh
Publsiher: Springer Nature
Total Pages: 299
Release: 2022-01-05
ISBN: 9811659710
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Advanced Functional Materials and Devices Book Excerpt:

This book presents the select proceedings of the International Conference on Advanced Functional Materials and Devices (AFMD 2021). It highlights the advancements in area of functional materials which includes electronic, magnetic, optical, adaptive and dielectric materials that are required to develop new functionalities with better performance in this new era of technology. The topics covered include materials for energy harvesting, biomedical applications, environmental monitoring, photonics and optoelectronic devices, strategic applications and high energy physics. This book will be a useful reference for beginners, researchers, academicians and professionals working in the area of material science and its allied fields.

Introduction to Microelectronics to Nanoelectronics

Introduction to Microelectronics to Nanoelectronics
Author: Manoj Kumar Majumder,Vijay Rao Kumbhare,Aditya Japa,Brajesh Kumar Kaushik
Publsiher: CRC Press
Total Pages: 328
Release: 2020-11-25
ISBN: 1000223078
Category: Science
Language: EN, FR, DE, ES & NL

Introduction to Microelectronics to Nanoelectronics Book Excerpt:

Focussing on micro- and nanoelectronics design and technology, this book provides thorough analysis and demonstration, starting from semiconductor devices to VLSI fabrication, designing (analog and digital), on-chip interconnect modeling culminating with emerging non-silicon/ nano devices. It gives detailed description of both theoretical as well as industry standard HSPICE, Verilog, Cadence simulation based real-time modeling approach with focus on fabrication of bulk and nano-devices. Each chapter of this proposed title starts with a brief introduction of the presented topic and ends with a summary indicating the futuristic aspect including practice questions. Aimed at researchers and senior undergraduate/graduate students in electrical and electronics engineering, microelectronics, nanoelectronics and nanotechnology, this book: Provides broad and comprehensive coverage from Microelectronics to Nanoelectronics including design in analog and digital electronics. Includes HDL, and VLSI design going into the nanoelectronics arena. Discusses devices, circuit analysis, design methodology, and real-time simulation based on industry standard HSPICE tool. Explores emerging devices such as FinFETs, Tunnel FETs (TFETs) and CNTFETs including their circuit co-designing. Covers real time illustration using industry standard Verilog, Cadence and Synopsys simulations.

Modern Manufacturing Technology

Modern Manufacturing Technology
Author: Jitendra Kumar Katiyar,Ranjeet Kumar Sahu
Publsiher: CRC Press
Total Pages: 142
Release: 2021-12-03
ISBN: 1000540723
Category: Technology & Engineering
Language: EN, FR, DE, ES & NL

Modern Manufacturing Technology Book Excerpt:

Modern Manufacturing Technology: Spotlight on Future summarizes the emergence and development of modern manufacturing techniques (MMTs) with a focus on metallic and advanced material-based additive manufacturing technologies and their potential applications. Further, it explores advanced machining techniques for production of novel nanomaterials. The book also covers modern sophisticated techniques for the fabrication of ultrafine electronic devices such as micro-electromechanical systems (MEMS), nano-electromechanical systems (NEMS), semiconductors, and optical systems. A dedicated chapter on manufacturing technology for Industry 4.0 is included. Features: Describes the background of manufacturing techniques in brief including the advent of and introduction to MMTs Reviews various types of MMTs established in recent years and their accelerated growth and development innovation-driven applications Overviews the physical and chemical techniques used for nanomaterials production Explores the fabrication mechanisms of MEMS, NEMS, semiconductors and optical devices Provides a conceptual overview of additive manufacturing technologies This book is geared to undergraduate and postgraduate students and professionals in mechanical and manufacturing engineering, and the manufacturing industry.